Volume 14, No.2
May issue 2009
1. SPring-8の現状／PRESENT STATUS OF SPring-8
高エネルギー加速器研究機構 物質構造科学研究所 Institute of Materials Structure Science, KEK
兵庫県立大学大学院 物質理学研究科 Graduate School of Material Science, University of Hyogo
京都大学大学院 工学研究科 Graduate School of Engineering, Kyoto University
広島大学大学院 理学研究科 Graduate School of Science, Hiroshima University
2. 最近の研究から／FROM LATEST RESEARCH
名古屋大学大学院 工学研究科 Department of Applied Chemistry, Graduate School of Engineering, Nagoya University
- Abstract
- High performance Si ultra-large scale integrated circuits (ULSI) are constantly advancing with scaling-down of metal-oxide-semiconductor field effect transistors (MOSFETs). However, for conventional scaling-down of MOSFETs, we are facing serious issues that are caused by specific physical limits of materials traditionally used. It is required to actively introduce new materials, new process technologies and new device structures, in order to overcome these problems that cannot be solved only with scaling technology of ULSI. We can investigate the chemical bonding structure and the electronic state at the interface buried in the complex multilayered structures of recent MOS devices by using a hard X-ray photoelectron spectroscopy (HAXPES), whose features are a long mean free path of photoelectrons, a large spectrum intensity, a high energy resolution, a high throughput, and a non-destructive measurement. In this study, we investigated the chemical bonding characteristics and the energy band structures of various multilayered samples by using HAXPES and aimed to establish the accurate analysis method for Si nanoelectronics.
[1]東京大学大学院 新領域創成科学研究科 Graduate School of Frontier Sciences, The University of Tokyo、[2]住友ゴム工業（株）研究開発本部 Sumitomo Rubber Industries Co., Ltd.
- Abstract
- We developed time-resolved two-dimensional ultra-small-angle and small-angle X-ray scattering at BL20XU and BL40B2 and applied the method to investigate the change of aggregate structure of nanoparticles in stretched rubber.
[1]Monash Centre for Synchrotron Science, [2]Department of Physiology, Monash University, [3]School of Physics, Monash University, [4]Division of Neonatology, Department of Pediatrics, Leiden University Medical Centre, [5]Division of Biological Engineering, Monash University, [6]SPring-8/JASRI
[1]Center for Applied Near-Field Optics Research, National Institute of Advanced Industrial Science & Technology, [2]Japan Synchrotron Radiation Institute, SPring-8
3. 談話室・ユーザー便り／OPEN HOUSE･A LETTERS FROM SPring-8 USERS
東京工業大学 応用セラミックス研究所 Materials and Structures Laboratory, Tokyo Institute of Technology
初代会長 東京大学名誉教授 The first president Professor Emeritus of the University of Tokyo
