Abstract: 　High performance Si ultra-large scale integrated circuits (ULSI) are constantly advancing with scaling-down of metal-oxide-semiconductor field effect transistors (MOSFETs). However, for conventional scaling-down of MOSFETs, we are facing serious issues that are caused by specific physical limits of materials traditionally used. It is required to actively introduce new materials, new process technologies and new device structures, in order to overcome these problems that cannot be solved only with scaling technology of ULSI. We can investigate the chemical bonding structure and the electronic state at the interface buried in the complex multilayered structures of recent MOS devices by using a hard X-ray photoelectron spectroscopy (HAXPES), whose features are a long mean free path of photoelectrons, a large spectrum intensity, a high energy resolution, a high throughput, and a non-destructive measurement. In this study, we investigated the chemical bonding characteristics and the energy band structures of various multilayered samples by using HAXPES and aimed to establish the accurate analysis method for Si nanoelectronics.

Pages 143 - 148 Download PDF (281.16 KB)

長期利用課題報告2　2次元極小角・小角X線散乱法を用いたゴム中ナノ粒子凝集構造の観察
Long-term Proposal Report 2: Study on Aggregate Structure of Nanoparticles in Rubber with Time-resolved Two-dimensional Ultra-Small-Angle and Small-Angle X-ray Scattering

雨宮　慶幸　AMEMIYA Yoshiyuki^[1]、篠原　佑也　 SHINOHARA Yuya^[1]、岸本　浩通　KISHIMOTO Hiroyuki^[2]

^[1]東京大学大学院　新領域創成科学研究科　Graduate School of Frontier Sciences, The University of Tokyo、^[2]住友ゴム工業（株）研究開発本部　Sumitomo Rubber Industries Co., Ltd.

Abstract: We developed time-resolved two-dimensional ultra-small-angle and small-angle X-ray scattering at BL20XU and BL40B2 and applied the method to investigate the change of aggregate structure of nanoparticles in stretched rubber.

Pages 149 - 153 Download PDF (243.46 KB)

Long-term Proposal Report 3:
IMAGING LUNG AERATION AT BIRTH USING PHASE CONTRAST X-RAY IMAGING

Robert A. Lewis^[1], Stuart B. Hooper^[2], Marcus J. Kitchen^[3], Melissa L. Siew^[2], Arjan B. te Pas^[4], Megan J. Wallace^[2], Andreas Fouras^[5], Naoto Yagi^[6], Kentaro Uesugi^[6]

^[1]Monash Centre for Synchrotron Science, ^[2]Department of Physiology, Monash University, ^[3]School of Physics, Monash University, ^[4]Division of Neonatology, Department of Pediatrics, Leiden University Medical Centre, ^[5]Division of Biological Engineering, Monash University, ^[6]SPring-8/JASRI

Pages 154 - 158 Download PDF (98.80 KB)

Long-term Proposal Report 4:
SUB-NANOSECOND STRUCTURAL SNAPSHOTS OF THE OPTICAL RECORDING PROCESS

Paul Fons^[1,2], Hitoshi Ohsawa^[2], A. V. Kolobov^[1,2], Toshio Fukaya^[1.2], Motohiro Suzuki^[2], Tomoya Uruga^[2], Naomi Kawamura^[2], Masafumi Takagaki^[2], Hajime Tanida^[2], Junji Tominaga^[2]

^[1]Center for Applied Near-Field Optics Research, National Institute of Advanced Industrial Science & Technology, ^[2]Japan Synchrotron Radiation Institute, SPring-8

Pages 159 - 166 Download PDF (245.44 KB)