Volume 07, No.1

新年ご挨拶
New Year’s Greeting

小林　庄一郎　KOBAYASHI Shoichiro

(財)高輝度光科学研究センター　会長　JASRI, President

Page 1 Download PDF (36.75 KB)

1. SPring-8の現状／PRESENT STATUS OF SPring-8

第9回（2002A）利用研究課題の採択について
The Proposals Accepted for Beamtimes in the 9th Public Use Term 2002A

（財）高輝度光科学研究センター　利用業務部　JASRI Users Office

Pages 2 - 17 Download PDF (77.31 KB)

2002A利用研究課題選定委員会を終えて
Report of the Proposal Review Committee for the 2002A Term

松井　純爾　MATSUI Junji

(財)高輝度光科学研究センター　SPring-8利用研究課題選定委員会　主査、姫路工業大学　理学部　Faculty of Science, Himeji Institute of Technology

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構造生物学ビームライン（BL38B1, BL40B2, BL41XU）の平成14年前期共同利用期間（2002A）における留保ビームタイムの運用について
Call for the Reserved Beam Time Application 2002A for the Structural Biology (BL38B1, BL40B2, BL41XU) Beamlines

（財）高輝度光科学研究センター　利用業務部 JASRI Users Office

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SPring-8運転・利用状況
SPring-8 Operational News

（財）高輝度光科学研究センター　所長室　計画調整グループ　JASRI Planning and Coordination Section, Director's Office

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2. その他のビームライン／OTHER BEAMLINES

A Status Report : Taiwan APCST Contract Beamline BL12XU

Yong Cai、Cheng-Chi Chen、Paul Chow、Ping-Chung Tseng、Ching-Shiang Hwang、Gao-Yu Hsiung、Duan-Jen Wang、Bo-Yuan Shew、King-Long Tsang

Asia and Pacific Council for Science and Technology

Abstract: The Taiwan APCST contract beamline BL12XU is part of the Taiwan x-ray facility at SPring-8, and is dedicated for inelastic x-ray scattering (IXS) with variable energy resolution from high (0.1−1 eV) to ultra-high (1−10 meV) resolution regimes. A secondary purpose is for high Q-resolution scattering and x-ray physics and optics. The Phase I construction of the beamline was completed in November 2001. The commissioning of the undulator and front-end components was carried out successfully in early December, together with the hutch radiation survey. The beamline has since been approved for commissioning. In the present article, we will briefly describe the scientific program, the key concepts and components of the beamline, the IXS spectrometer, and the initial commissioning of the beamline.

Pages 23 - 27 Download PDF (1.00 MB)

3. 最近の研究から／FROM LATEST RESEARCH

半導体ウエハのWD-TXRFによる極微量元素検出
Detection Limits of Ultratrace Elements on Semiconductor Wafers Using WD-TXRF

淡路　直樹　AWAJI Naoki^[1]、竹村　モモ子　TAKEMURA Momoko^[2]、尾﨑　伸司　OZAKI Shinji^[3]、飯原　順次　IIHARA Junji^[4]

^[1]㈱富士通研究所　Fujitsu Laboratories, Ltd.、^[2]㈱東　芝　TOSHIBA Corporation、^[3]㈱松下テクノリサーチ　Matsushita Techno Research, Inc.、^[4]住友電気工業㈱　SUMITOMO ELECTRIC INDUSTRIES, Ltd.

Abstract: We developed the wavelength-dispersive total reflection x-ray fluorescence (WD-TXRF) equipment for the ultratrace element detection on semiconductor wafers. In combining the equipment with the extremely strong x-ray of BL40XU at SPring-8, we studied the relation between the detection limit and the measurement conditions. As a result, together with the concentration techniques for semiconductor wafer, remarkable detection limit of 4x10⁶atoms/cm² has been achieved for Ni and Cu elements for the first time.

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