Title/Place of Publication
9939
2007.01.30 10:57
Photoemission Study of Ultrathin HfSiON/Si(100) Systems
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Transactions of the Materials Research Society of Japan
31 1 2006 125-128
16th Material Research and Sciences-Japan
2005.12.09-12.11 Tokyo, Japan
Authors
 
First Author 0016174 Ohta Akio Hiroshima University
Coauthor 1 Nakagawa Hiroshi Hiroshima University
Coauthor 2 0017074 Murakami Hideki Hiroshima University
Coauthor 3 Higashi Seiichirou Hiroshima University
Coauthor 4 0016161 Miyazaki Seiichi Hiroshima University
Coauthor 5 Inumiya Seiji Semiconductor Leading Edge Technologies, Inc.
Coauthor 6 Nara Yasuo Semiconductor Leading Edge Technologies, Inc.
Related Proposal Information
2005A0410 BL47XU 財満 鎭明
2005B0005 BL47XU 財満 鎭明