Title/Place of Publication
Publication ID
9936
Date Created
2007.01.30 10:57
DOI
10.1107/S090904950602855X
Open Access URL
English Title
Crystallinity Estimation of Thin Silicon-on-Insulator Layers by Means of Diffractometry using a Highly Parallel X-ray Microbeam
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Journal of Synchrotron Radiation
Vol.
13
No.
5
Year of Publication
2006
Page
373-377
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0003437
Takeda
Shingo
SPring-8/JASRI
Coauthor 1
0001341
Yokoyama
Kazushi
Hyogo Prefectural Center for Advanced Science and Technology
Coauthor 2
0001231
Tsusaka
Yoshiyuki
University of Hyogo
Coauthor 3
0001230
Kagoshima
Yasushi
University of Hyogo
Coauthor 4
0001232
Matsui
Junji
Hyogo Prefectural Center for Advanced Science and Technology
Coauthor 5
0015928
Ogura
Atsushi
Meiji University
Related Proposal Information
Proposal Number
C03B5043
Beamline
BL24XU
Project Leader
津坂 佳幸