Title/Place of Publication
9936
2007.01.30 10:57
10.1107/S090904950602855X
Crystallinity Estimation of Thin Silicon-on-Insulator Layers by Means of Diffractometry using a Highly Parallel X-ray Microbeam
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Journal of Synchrotron Radiation
13 5 2006 373-377
Authors
 
First Author 0003437 Takeda Shingo SPring-8/JASRI
Coauthor 1 0001341 Yokoyama Kazushi Hyogo Prefectural Center for Advanced Science and Technology
Coauthor 2 0001231 Tsusaka Yoshiyuki University of Hyogo
Coauthor 3 0001230 Kagoshima Yasushi University of Hyogo
Coauthor 4 0001232 Matsui Junji Hyogo Prefectural Center for Advanced Science and Technology
Coauthor 5 0015928 Ogura Atsushi Meiji University
Related Proposal Information
C03B5043 BL24XU 津坂 佳幸