Title/Place of Publication
Publication ID
987
Date Created
2007.01.30 10:55
DOI
10.1107/S0909049502003448
Open Access URL
English Title
Synchrotron-Radiation X-Ray Topography Surface Strain in Large-Diameter Silicon Wafers
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Journal of Synchrotron Radiation
Vol.
9
No.
3
Year of Publication
2002
Page
166-168
Place of Publication (Oral, Poster)
Conference Title
The 5th Harima International Forum, Harima Conference (HIF 2001): New Aspect of X-ray Imaging Technology with Synchrotron Radiation - Present Status and Future Possibility -
Date
2001.07.12-07.14
Venue
Harima Science Garden City Hyogo, Japan
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0003776
Kawado
Seiji
Rigaku Corporation
Coauthor 1
0001768
Iida
Satoshi
Toyama University
Coauthor 2
0006044
Yamaguchi
Satoshi
Toyama University
Coauthor 3
0004124
Kimura
Shigeru
NEC Corporation
Coauthor 4
0005461
Hirose
Yoshiharu
Toyota Central Research & Development Laboratories, Inc.
Coauthor 5
0001794
Kajiwara
Kentaro
JASRI
Coauthor 6
0001769
Chikaura
Yoshinori
Kyushu Institute of Technology
Coauthor 7
0005066
Umeno
Masataka
Osaka University
Related Proposal Information
Proposal Number
2001A0053
Beamline
BL20B2
Project Leader
川戸 清爾
Proposal Number
2000B0245
Beamline
BL20B2
Project Leader
川戸 清爾
Proposal Number
2000A0130
Beamline
BL20B2
Project Leader
川戸 清爾