Title/Place of Publication
9853
2007.01.30 10:57
10.1143/JJAP.45.6795
White X-ray Topography of Lattice Undulation in Bonded Silicon-on-Insulator Wafers
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Japanese Journal of Applied Physics
45 9A 2006 6795-6799
Authors
 
First Author 0006085 Fukuda Kazunori University of Hyogo
Coauthor 1 0006087 Yoshida Takayoshi Osaka University
Coauthor 2 0001281 Shimura Takayoshi Osaka University
Coauthor 3 Yasutake Kiyoshi Osaka University
Coauthor 4 Umeno Masataka Osaka University
Coauthor 5 0001768 Iida Satoshi Toyama University
Related Proposal Information
2001B0117 BL28B2 志村 考功