Title/Place of Publication
Publication ID
967
Date Created
2007.01.30 10:55
DOI
Open Access URL
English Title
Epitaxially Ordered Structure in the Buried Oxide Layer of SIMOX Wafers
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
The Physics and Chemistry of SiO2 and the Si-SiO2 Interface-4, 2000: Proceedings of the Fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface
Vol.
2000-2
No.
Year of Publication
2000
Page
241-249
Place of Publication (Oral, Poster)
Conference Title
Fouth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface 4
Date
2000.05.15-05.18
Venue
Tronto, Canada
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0001281
Shimura
Takayoshi
Osaka University
Coauthor 1
0004419
Hosoi
Takuji
Osaka University
Coauthor 2
0005066
Umeno
Masataka
Osaka University
Related Proposal Information
Proposal Number
1999A0024
Beamline
BL09XU
Project Leader
志村 考功