Title/Place of Publication
Publication ID
9127
Date Created
2007.01.30 10:57
DOI
10.2472/jsms.54.704
Open Access URL
https://www.jstage.jst.go.jp/article/jsms/54/7/54_7_704/_article/-char/ja/
English Title
Residual Stress Distribution in TiN Thin Films with Fiber Texture Measured by Grazing Incidence and Scattering Vector X-Ray Methods
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
材料 (Journal of the Society of Materials Science, Japan)
Vol.
54
No.
7
Year of Publication
2005
Page
704-709
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0005201
Tanaka
Keisuke
Nagoya University
Coauthor 1
0006320
Akiniwa
Yoshiaki
Nagoya University
Coauthor 2
0013460
Kawai
Masanori
Nagoya University
Coauthor 3
0006323
Ito
Toshimasa
Denso Corporation
Related Proposal Information
Proposal Number
2004A0309
Beamline
BL13XU
Project Leader
田中 啓介