Title/Place of Publication
Publication ID
7795
Date Created
2007.01.30 10:56
DOI
10.3131/jvsj.48.343
Open Access URL
English Title
Synchrotron Radiation Photoemission Spectroscopy for Chemical Bonding of N Atoms in Oxynitride Films Formed at SiO
2
/Si(001) by N
+
Beam Irradiation
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
真空 (Journal of the Vacuum Society of Japan)
Vol.
48
No.
5
Year of Publication
2005
Page
343-345
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0002641
Hachiue
Syunsuke
SPring-8/JAERI, Kobe University
Coauthor 1
0000390
Teraoka
Yuden
SPring-8/JAERI
Related Proposal Information
Proposal Number
None
Beamline
BL23SU
Facility to be used
SPring-8
Classification within the Site
Experiment