Title/Place of Publication
Publication ID
7555
Date Created
2007.01.30 10:56
DOI
Open Access URL
English Title
Characterization of Amorphous Hafnium Silicate and Hafnium Aluminate Films by Grazing-Incidence X-ray Scattering
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Transactions of the Materials Research Society of Japan
Vol.
30
No.
1
Year of Publication
2005
Page
221-224
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0002088
Hirosawa
Ichiro
SPring-8/JASRI
Coauthor 1
Kitajima
Hiroshi
Semiconductor Lead Edge Technology, Inc.
Coauthor 2
Torii
Kazuyoshi
Semiconductor Lead Edge Technology, Inc.
Related Proposal Information
Proposal Number
J04B0509
Beamline
BL19B2
Project Leader
廣沢 一郎
Proposal Number
2004A0540
Beamline
BL46XU
Project Leader
廣沢 一郎