User Information

Title/Place of Publication
Publication ID	7500
Date Created	2007.01.30 10:56
DOI	10.1016/j.tsf.2004.09.040
Open Access URL
English Title	Comparison of Ordered Structure in Buried Oxide Layers in High-Dose, Low-Dose, and Internal-Thermal-Oxidation Separation-by-Implanted-Oxygen Wafers
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Thin Solid Films Vol. 476 No. 1 Year of Publication 2005 Page 125-129
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area
Research Method

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0001281	Shimura	Takayoshi	Osaka University
Coauthor 1	0006085	Fukuda	Kazunori	Osaka University
Coauthor 2		Yasutake	Kiyoshi	Osaka University
Coauthor 3	0004419	Hosoi	Takuji	Osaka University
Coauthor 4	0005066	Umeno	Masataka	Fukui University of Technology

Related Proposal Information
Proposal Number 1999A0024 Beamline BL09XU Project Leader 志村考功
Proposal Number 2002A0168 Beamline BL13XU Project Leader 志村考功