Title/Place of Publication
Publication ID
7127
Date Created
2007.01.30 10:56
DOI
10.1016/j.microrel.2004.02.017
Open Access URL
English Title
Characterization of Interface Defects Related to Negative-Bias Temperature Instability in Ultrathin Plasma-Nitrided SiON/Si<100> Systems
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Microelectronics Reliability
Vol.
45
No.
1
Year of Publication
2005
Page
57-64
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
Fujieda
Shinji
NEC Corporation
Coauthor 1
Miura
Yoshinao
NEC Corporation
Coauthor 2
Saitoh
Motofumi
NEC Corporation
Coauthor 3
0000390
Teraoka
Yuden
SPring-8/JAERI
Coauthor 4
0001305
Yoshigoe
Akitaka
SPring-8/JAERI
Related Proposal Information
Proposal Number
None
Beamline
BL23SU
Facility to be used
SPring-8
Classification within the Site
Experiment