Title/Place of Publication
7127
2007.01.30 10:56
10.1016/j.microrel.2004.02.017
Characterization of Interface Defects Related to Negative-Bias Temperature Instability in Ultrathin Plasma-Nitrided SiON/Si<100> Systems
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Microelectronics Reliability
45 1 2005 57-64
Authors
 
First Author Fujieda Shinji NEC Corporation
Coauthor 1 Miura Yoshinao NEC Corporation
Coauthor 2 Saitoh Motofumi NEC Corporation
Coauthor 3 0000390 Teraoka Yuden SPring-8/JAERI
Coauthor 4 0001305 Yoshigoe Akitaka SPring-8/JAERI
Related Proposal Information
None BL23SU SPring-8 Experiment