Title/Place of Publication
Publication ID
6430
Date Created
2007.01.30 10:56
DOI
10.1016/j.tsf.2003.12.102
Open Access URL
English Title
Residual Stress and Thermal Stress Observation in Thin Copper Films
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Thin Solid Films
Vol.
459
No.
1-2
Year of Publication
2004
Page
245-248
Place of Publication (Oral, Poster)
Conference Title
The European Vacuum Congress Berlin Combined with 8th European Vacuum Conference EVC-8 and Annual Conference of the German Vacuum Society
Date
2003.06.23-06.26
Venue
Berlin, Germany
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0008084
Hanabusa
Takao
The University of Tokushima
Coauthor 1
0008085
Kusaka
Kazuya
The University of Tokushima
Coauthor 2
0003369
Sakata
Osami
JASRI
Related Proposal Information
Proposal Number
2003A0305
Beamline
BL13XU
Project Leader
英 崇夫