Title/Place of Publication
6287
2007.01.30 10:56
10.1063/1.1737793
X-ray Photoelectron Spectroscopy Study on SiO2/Si Interface Structures Formed by Three Kinds of Atomic Oxygen at 300℃
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Applied Physics Letters
84 19 2004 3756-3758
Authors
 
First Author 0009776 Shoji Masatoshi Musashi Institute of Technology
Coauthor 1 0008045 Shiraishi Takayoshi Musashi Institute of Technology
Coauthor 2 0008044 Takahashi Kensuke Musashi Institute of Technology
Coauthor 3 0008035 Nohira Hiroshi Musashi Institute of Technology
Coauthor 4 0013310 Azuma Kazufumi Advanced LCD Technologies Development Center Co., Ltd.
Coauthor 5 Nakata Yukihiko Advanced LCD Technologies Development Center Co., Ltd.
Coauthor 6 0001866 Takata Yasutaka SPring-8/RIKEN
Coauthor 7 0001732 Shin Shik SPring-8/RIKEN
Coauthor 8 0001835 Kobayashi Keisuke SPring-8/JASRI
Coauthor 9 0007880 Hattori Takeo Musashi Institute of Technology
Related Proposal Information
2003B0103 BL27SU 服部 健雄