User Information

Title/Place of Publication
Publication ID	6272
Date Created	2007.01.30 10:56
DOI	10.1299/jsmea.47.312
Open Access URL	https://doi.org/10.1299/jsmea.47.312
English Title	Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAlN Thin Films by Synchrotron Radiation
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title JSME International Journal Series A Vol. 47 No. 3 Year of Publication 2004 Page 312-317
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area
Research Method

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0008084	Hanabusa	Takao	The University of Tokushima
Coauthor 1	0008085	Kusaka	Kazuya	The University of Tokushima
Coauthor 2	0008092	Matsue	Tatsuya	Niihama National College of Technology
Coauthor 3	0008086	Nishida	Masayuki	Kobe City College of Technology
Coauthor 4	0003369	Sakata	Osami	SPring-8/JASRI
Coauthor 5	0008195	Sato	Toshiki	Kobe Steel, Ltd.

Related Proposal Information
Proposal Number 2002A0258 Beamline BL13XU Project Leader 英崇夫