Title/Place of Publication
6264
2007.01.30 10:56
10.1143/JJAP.42.7493
Novel Interface Structures between Ultrathin Oxynitride and Si(001) Studied by X-ray Diffraction
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Japanese Journal of Applied Physics
42 12 2003 7493-7496
Authors
 
First Author 0003142 Takahashi Isao Kwansei Gakuin University
Coauthor 1 0006215 Shimazu Hiromitsu Kwansei Gakuin University
Coauthor 2 0008200 Inoue Kouji Kwansei Gakuin University
Coauthor 3 0007338 Kitahara Amane SPring-8/JASRI
Coauthor 4 0006067 Tanaka Norihisa Kwansei Gaukin University
Coauthor 5 0003408 Terauchi Hikaru Kwansei Gakuin University
Coauthor 6 0006082 Kada Toshiteru Kwansei Gakuin University
Coauthor 7 0003157 Doi Syuichi Fujitsu Laboratories
Coauthor 8 0003409 Nomura Kenji Fujitsu Laboratories
Coauthor 9 0004141 Awaji Naoki Fujitsu Laboratories
Coauthor 10 0004072 Komiya Satoshi SPring-8/JASRI
Related Proposal Information
2000B0230 BL09XU 古宮 聰