Title/Place of Publication
Publication ID
6137
Date Created
2007.01.30 10:56
DOI
10.1051/epjap:2004067
Open Access URL
English Title
Characterization of SOI Wafers by Synchrotron X-ray Topography
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
The European Physical Journal - Applied Physics
Vol.
27
No.
1-3
Year of Publication
2004
Page
439-442
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0001281
Shimura
Takayoshi
Osaka University
Coauthor 1
0006085
Fukuda
Kazunori
Osaka University
Coauthor 2
Yasutake
Kiyoshi
Osaka University
Coauthor 3
Umeno
Masataka
Osaka University
Related Proposal Information
Proposal Number
2002B0596
Beamline
BL20B2
Project Leader
志村 考功
Proposal Number
2003A0276
Beamline
BL20B2
Project Leader
志村 考功