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6136 |
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2007.01.30 10:56 |
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10.14852/jcersjsuppl.112.0.S1476.0 |
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https://doi.org/10.14852/jcersjsuppl.112.0.S1476.0 |
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Grazing Incidence X-ray Scattering to Characterize the Thin Amorphous SiOx Film on Silicon Substrate |
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Refereed Journals, Doctoral Thesis, Refereed Proceedings |
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日本セラミックス協会学術論文誌 (Journal of the Ceramic Society of Japan)
112
1305
2004
S1476-S1478
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The 5th Meeting of the Pacific Rim Ceramic Societies
2003.09.29-10.02
Nagoya, Japan
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