Title/Place of Publication
6136
2007.01.30 10:56
10.14852/jcersjsuppl.112.0.S1476.0
https://doi.org/10.14852/jcersjsuppl.112.0.S1476.0
Grazing Incidence X-ray Scattering to Characterize the Thin Amorphous SiOx Film on Silicon Substrate
Refereed Journals, Doctoral Thesis, Refereed Proceedings
日本セラミックス協会学術論文誌 (Journal of the Ceramic Society of Japan)
112 1305 2004 S1476-S1478
The 5th Meeting of the Pacific Rim Ceramic Societies
2003.09.29-10.02 Nagoya, Japan
Authors
 
First Author 0002088 Hirosawa Ichiro JASRI
Coauthor 1 0004121 Uehara Yasushi Mitsubishi Electric Corporation
Coauthor 2 0002072 Sato Masugu JASRI
Coauthor 3 0003515 Umesaki Norimasa JASRI
Related Proposal Information
2003A0645 BL19B2 廣沢 一郎
C00B4018 BL16B2 上原 康