Title/Place of Publication
Publication ID
5688
Date Created
2007.01.30 10:56
DOI
10.1016/S0169-4332(03)00389-1
Open Access URL
English Title
Depth Profiling of Oxynitride Film Formed on Si(100) by Photon Energy Dependent Photoelectron Spectroscopy
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Applied Surface Science
Vol.
216
No.
1-4
Year of Publication
2003
Page
287-290
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0008118
Nishizaki
Kyoko
Musashi Institute of Technology
Coauthor 1
0008035
Nohira
Hiroshi
Musashi Institute of Technology
Coauthor 2
0008044
Takahashi
Kensuke
Musashi Institute of Technology
Coauthor 3
0006816
Kamakura
Nozomu
SPring-8/RIKEN
Coauthor 4
0001866
Takata
Yasutaka
SPring-8/RIKEN
Coauthor 5
0001732
Shin
Shik
SPring-8/RIKEN
Coauthor 6
0001835
Kobayashi
Keisuke
SPring-8/JASRI
Coauthor 7
Tamura
Naoyoshi
Fujitsu, Ltd.
Coauthor 8
Hikazutani
Kenichi
Fujitsu, Ltd.
Coauthor 9
0007880
Hattori
Takeo
Musashi Institute of Technology
Related Proposal Information
Proposal Number
2003B0103
Beamline
BL27SU
Project Leader
服部 健雄
Proposal Number
2002B0477
Beamline
BL27SU
Project Leader
服部 健雄