Title/Place of Publication
5422
2007.01.30 10:56
10.1063/1.1586970
Application of Phase-Retrieval X-Ray Diffractometry to Carbon Doped SiGe(C)/Si(C) Superlattice Structures
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Journal of Applied Physics
94 2 2003 1007-1012
Authors
 
First Author 0013606 Siu Karen K.-W. Monash University
Coauthor 1 0001876 Nikulin Andrei Monash University
Coauthor 2 Zaumsei Peter Innovations for High Perfomance Microelectronics
Coauthor 3 0000314 Yamazaki Hiroshi SPring-8/JASRI
Coauthor 4 0000179 Ishikawa Tetsuya RIKEN/SPring-8
Related Proposal Information
None BL29XU SPring-8 Instrumentation & Technique