Title/Place of Publication
Publication ID
4939
Date Created
2007.01.30 10:56
DOI
10.1107/S0021889803005132
Open Access URL
English Title
Grazing Incidence Small-Angle X-Ray Scattering and Diffraction Study of the Resistance of Mo Implanted Si Wafer After Annealing
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Journal of Applied Crystallography
Vol.
36
No.
3-1
Year of Publication
2003
Page
612-616
Place of Publication (Oral, Poster)
Conference Title
XIIth International Conference on Small-Angle Scattering
Date
2002.08.25-08.29
Venue
Venice, Italy
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0006844
Lee
Chih-Hao
National Tsing-Hua University
Coauthor 1
0008288
Qiu
Chui-Zhang
National Tsing-Hua University
Coauthor 2
0006845
Yu
Kuan-Li
National Tsing-Hua University
Coauthor 3
Liang
Jenq-Horng
National Tsing-Hua University
Coauthor 4
Tsai
Chun-Tse
National Tsing-Hua University
Coauthor 5
0007017
Lin
Ming-Zhe
National Tsing-Hua University
Related Proposal Information
Proposal Number
C02A1002
Beamline
BL12B2
Project Leader
Lee Chih-Hao
Proposal Number
C02A1003
Beamline
BL12B2
Project Leader
Lee Chih-Hao