Title/Place of Publication
Publication ID
4779
Date Created
2007.01.30 10:56
DOI
10.1016/j.vacuum.2004.01.029
Open Access URL
English Title
Evaluation of Internal Stresses in TiN Thin Films by Synchrotron Radiation
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Vacuum
Vol.
74
No.
3-4
Year of Publication
2004
Page
571-575
Place of Publication (Oral, Poster)
Conference Title
The 7th International Symposium on Sputtering & Plasma Processes (ISSP 2003)
Date
2003.06.11-06.13
Venue
Kanazawa, Japan
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0008084
Hanabusa
Takao
Tokushima University
Coauthor 1
0008085
Kusaka
Kazuya
Tokushima University
Coauthor 2
0008092
Matsue
Tatsuya
Niihama National College of Technology
Coauthor 3
0008086
Nishida
Masayuki
Kobe City College of Technology
Coauthor 4
0003369
Sakata
Osami
JASRI
Coauthor 5
0008195
Sato
Toshiki
Kobe Steel, Ltd.
Related Proposal Information
Proposal Number
2002A0258
Beamline
BL13XU
Project Leader
英 崇夫