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4778 |
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2007.01.30 10:56 |
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10.1299/jsmeatem.2003.2._OS04W0203 |
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Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAlN Thin Films by Synchrotron Radiation |
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Refereed Journals, Doctoral Thesis, Refereed Proceedings |
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Proceedings of International Conference on Advanced Technology in Experimantal Mechanics 2003
03-207
2003
OS04W0203
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International Conference on Advanced Technology in Experimantal Mechanics 2003 (ATEM'03)
2003.09.10-09.12
Nagoya, Japan
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