Title/Place of Publication
Publication ID
4757
Date Created
2007.01.30 10:56
DOI
10.1016/S1369-8001(02)00130-0
Open Access URL
English Title
X-Ray Characterization of Crystal Perfection and Surface Contamination in Large-Diameter Silicon Wafers
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Materials Science in Semiconductor Processing
Vol.
5
No.
4-5
Year of Publication
2003
Page
435-444
Place of Publication (Oral, Poster)
Conference Title
E-MRS 2002 Spring Meeting, Symposium 2002
Date
2002.06.19-06.21
Venue
Strasbourg, France
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0003776
Kawado
Seiji
Rigaku Corporation
Related Proposal Information
Proposal Number
2001A0053
Beamline
BL20B2
Project Leader
川戸 清爾
Proposal Number
2001A0096
Beamline
BL20B2
Project Leader
飯田 敏
Proposal Number
2001B0306
Beamline
BL20B2
Project Leader
川戸 清爾