User Information

Title/Place of Publication
Publication ID	39551
Date Created	2020.03.06 09:58
DOI	10.7567/JJAP.57.090314
Open Access URL	https://doi.org/10.7567/JJAP.57.090314
English Title	X-ray Topographical Analysis of 4H-SiC Epitaxial Layers using a Forward-Transmitted Beam under a Multiple-Beam Diffraction Condition
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Japanese Journal of Applied Physics Vol. 57 No. 9 Year of Publication 2018 Page 090314
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area	[A80] Industrial Applications
Research Method	[M60] X-ray Imaging

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0009160	Kamata	Isaho	Central Research Institute of Electric Power Industry
Coauthor 1	0001231	Tsusaka	Yoshiyuki	University of Hyogo
Coauthor 2	0006449	Tanuma	Ryohei	Central Research Institute of Electric Power Industry
Coauthor 3	0001232	Matsui	Junji	University of Hyogo

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Proposal Number 2018B3269 Beamline BL24XU Project Leader 鎌田功穂