Title/Place of Publication
Publication ID
3694
Date Created
2007.01.30 10:56
DOI
10.1143/JJAP.42.L117
Open Access URL
English Title
Large-Area X-Ray Topographs of Lattice Undulation of Bonded Silicon-On-Insulator Wafers
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Japanese Journal of Applied Physics
Vol.
42
No.
2A
Year of Publication
2003
Page
L117-L119
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0006085
Fukuda
Kazunori
Osaka University
Coauthor 1
0006087
Yoshida
Takayoshi
Osaka University
Coauthor 2
0001281
Shimura
Takayoshi
Osaka University
Coauthor 3
Yasutake
Kiyoshi
Osaka University
Coauthor 4
0005066
Umeno
Masataka
Fukui University
Related Proposal Information
Proposal Number
2002A0171
Beamline
BL20B2
Project Leader
志村 考功