Title/Place of Publication
Publication ID
3692
Date Created
2007.01.30 10:56
DOI
10.4028/www.scientific.net/SSP.82-84.485
Open Access URL
English Title
Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Solid State Phenomena
Vol.
82-84
No.
Year of Publication
2002
Page
485-490
Place of Publication (Oral, Poster)
Conference Title
9th International Autamn Meeting of Gettering and Defect Engineering in Semiconductor Technology
Date
2001.09.30-10.03
Venue
Santa Tecla, Italy
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0001281
Shimura
Takayoshi
Osaka University
Coauthor 1
0004419
Hosoi
Takuji
Osaka University
Coauthor 2
0006085
Fukuda
Kazunori
Osaka University
Coauthor 3
0005066
Umeno
Masataka
Osaka University
Related Proposal Information
Proposal Number
1999A0024
Beamline
BL09XU
Project Leader
志村 考功