User Information

Title/Place of Publication
Publication ID	34240
Date Created	2017.08.08 13:57
DOI	10.1088/1361-6528/aa6a9f
Open Access URL
English Title	Simple and Scalable Preparation of Master Mold for Nanoimprint Lithography
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Nanotechnology Vol. 28 No. 20 Year of Publication 2017 Page 205303
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area	[A80] Industrial Applications
Research Method	[M20] X-ray Scattering

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0039118	Yamada	Yuri	Toyota Central Research and Development Laboratories, Inc.
Coauthor 1		Ito	Kota	Toyota Central Research and Development Laboratories, Inc.
Coauthor 2		Miura	Atsushi	Toyota Central Research and Development Laboratories, Inc.
Coauthor 3		Iizuka	Hideo	Toyota Central Research and Development Laboratories, Inc.
Coauthor 4	0029327	Wakayama	Hiroaki	Toyota Central Research and Development Laboratories, Inc.

Related Proposal Information
Proposal Number 2015A7003 Beamline BL33XU Project Leader 原田雅史
Proposal Number 2015B7003 Beamline BL33XU Project Leader 原田雅史