User Information

Title/Place of Publication
Publication ID	33603
Date Created	2017.05.08 12:10
DOI	10.1149/07505.0207ecst
Open Access URL
English Title	Oxidizing Species Dependence of the Interface Reaction during Atomic-Layer-Deposition Process and Post-Deposition-Anneal
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title ECS Transactions Vol. 75 No. 5 Year of Publication 2016 Page 207-214
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area	[A30] Materials Science and Engineering
Research Method	[M50] Photoelectron Spectroscopy

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0018695	Suwa	Tomoyuki	Tohoku University
Coauthor 1	0015560	Teramoto	Akinobu	Tohoku University
Coauthor 2		Koda	Yasumasa	Tohoku University
Coauthor 3	0045097	Saito	Masaya	Tohoku University
Coauthor 4		Sugita	Hisaya	Tohoku University
Coauthor 5		Hayashi	Marie	Canon Anelva Corporation
Coauthor 6		Tsuchimoto	Junichi	Canon Anelva Corporation
Coauthor 7		Ishii	Hidekazu	Tohoku University
Coauthor 8		Shiba	Yoshinobu	Tohoku University
Coauthor 9		Shirai	Yasuyuki	Tohoku University
Coauthor 10		Sugawa	Shigetoshi	Tohoku University

Related Proposal Information
Proposal Number 2016A5130 Beamline BL16XU Project Leader 田中政幸