User Information

Title/Place of Publication
Publication ID	3339
Date Created	2007.01.30 10:56
DOI	10.1016/S0168-583X(02)01406-4
Open Access URL
English Title	Measurement of Minute Local Strain in Semiconductor Materials and Electronic Devices by Using a Highly Parallel X-Ray Microbeam
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Nuclear Instruments and Methods in Physics Research Section B Vol. 199 No. Year of Publication 2003 Page 15-18
Place of Publication (Oral, Poster)	Conference Title International Conference on Synchrotron Radiation in Materials Science (SRMS) Date 2002.01.21-01.24 Venue Shangri-La Hotel, Singapore
Research Area
Research Method

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0001232	Matsui	Junji	Himeji Institute of Technology
Coauthor 1	0001231	Tsusaka	Yoshiyuki	Himeji Institute of Technology
Coauthor 2	0001341	Yokoyama	Kazushi	Himeji Institute of Technology
Coauthor 3	0003437	Takeda	Shingo	Himeji Institute of Technology
Coauthor 4	0005962	Katou	Madomi	Himeji Institute of Technology
Coauthor 5	0005961	Kurihara	Hideaki	Himeji Institute of Technology
Coauthor 6	0005966	Watanabe	Kyoko	Himeji Institute of Technology
Coauthor 7	0001230	Kagoshima	Yasushi	Himeji Institute of Technology
Coauthor 8	0004124	Kimura	Shigeru	Himeji Institute of Technology

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