Title/Place of Publication
Publication ID
3327
Date Created
2007.01.30 10:56
DOI
10.1143/JJAP.41.L1013
Open Access URL
English Title
Measurement of Strain Distribution in InGaAsP Selective-Area Growth Layers Using a Micro-Area X-Ray Diffraction Method with Sub-μm Spatial Resolution
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Japanese Journal of Applied Physics
Vol.
41
No.
9A/B
Year of Publication
2002
Page
L1013-L1015
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0004124
Kimura
Shigeru
NEC Corporation
Coauthor 1
0001230
Kagoshima
Yasushi
Himeji Institute of Technology
Coauthor 2
0003403
Kobayashi
Kenji
NEC Corporation
Coauthor 3
0004081
Izumi
Koichi
NEC Corporation
Coauthor 4
Sakata
Yasutaka
NEC Kansai, Ltd.
Coauthor 5
Sudo
Shingo
NEC Compound Semiconductor Devices
Coauthor 6
0004807
Yokoyama
Yoshiyuki
Himeji Institute of Technology
Coauthor 7
0005964
Niimi
Toshihiro
Himeji Institute of Technology
Coauthor 8
0001231
Tsusaka
Yoshiyuki
Himeji Institute of Technology
Coauthor 9
0001232
Matsui
Junji
Himeji Institute of Technology
Related Proposal Information
Proposal Number
C01B5046
Beamline
BL24XU
Project Leader
泉 弘一