Title/Place of Publication
28395
2015.02.16 12:35
10.1002/sia.5701
Thickness and Coverage Determination of Multilayer with an Island-like Overlayer by Hard X-ray Photoelectron Spectroscopy at Multiple Photon Energies
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Surface and Interface Analysis
47 2 2015 265-269
[A30] Materials Science and Engineering
[M50] Photoelectron Spectroscopy
Authors
 
First Author 0006869 Isomura Noritake Toyota Central Research and Development Laboratories, Inc.
Coauthor 1 0014336 Kataoka Keita Toyota Central Research and Development Laboratories, Inc.
Coauthor 2 Horibuchi Kayo Toyota Central Research and Development Laboratories, Inc.
Coauthor 3 0006932 Dohmae Kazuhiko Toyota Central Research and Development Laboratories, Inc.
Coauthor 4 0000627 Oji Hiroshi SPring-8/JASRI
Coauthor 5 0015680 Cui Yi-Tao SPring-8/JASRI, The University of Tokyo
Coauthor 6 0000618 Son JinYoung SPring-8/JASRI
Coauthor 7 0033227 Kitazumi Kousuke Toyota Central Research and Development Laboratories, Inc.
Coauthor 8 0018550 Takahashi Naoko Toyota Central Research and Development Laboratories, Inc.
Coauthor 9 0021962 Kimoto Yasuji Toyota Central Research and Development Laboratories, Inc.
Related Proposal Information
2013B1519 BL46XU 磯村 典武
2012A7019 BL33XU 堂前 和彦
2012B7019 BL33XU 磯村 典武