Title/Place of Publication
Publication ID
27200
Date Created
2014.08.08 10:03
DOI
10.1116/1.4886770
Open Access URL
English Title
Mass Densification and Defect Restoration in Chemical Vapor Deposition Silicon Dioxide Film using Ar Plasma Excited by Microwave
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Journal of Vacuum Science & Technology A
Vol.
32
No.
5
Year of Publication
2014
Page
051502
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
[A80] Industrial Applications
Research Method
[M90] Other X線反射率
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0005022
Kawase
Kazumasa
Mitsubishi Electric Corporatoin
Coauthor 1
0028927
Motoya
Tsukasa
Mitsubishi Electric Corporation
Coauthor 2
0004121
Uehara
Yasushi
Mitsubishi Electric Corporation
Coauthor 3
0015560
Teramoto
Akinobu
Tohoku University
Coauthor 4
0018695
Suwa
Tomoyuki
Tohoku University
Coauthor 5
Ohmi
Tadahiro
Tohoku University
Related Proposal Information
Proposal Number
2012A5131
Beamline
BL16XU
Project Leader
河瀬 和雅