Title/Place of Publication
2392
2007.01.30 10:55
10.3131/jvsj.45.604
https://doi.org/10.3131/jvsj.45.604
Initial Oxidation Processes of Si(001) Surfaces by Supersonic O2 Mollecular Beams: Different Oxidation Mechanisms for Clean and Partially-Oxidized Surfaces
Refereed Journals, Doctoral Thesis, Refereed Proceedings
真空 (Journal of the Vacuum Society of Japan)
45 7 2002 604-608
第42回 真空に関する連合講演会
2001.10.17-10.19 Tokyo, Japan
Authors
 
First Author 0000390 Teraoka Yuden JAERI
Coauthor 1 0001305 Yoshigoe Akitaka JAERI
Related Proposal Information
None BL23SU SPring-8 Experiment