User Information

Title/Place of Publication
Publication ID	23586
Date Created	2013.04.26 11:27
DOI	10.1016/j.mssp.2012.04.010
Open Access URL
English Title	Direct Observation of Local Atomic Structure in Arsenic Implanted Silicon
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Materials Science in Semiconductor Processing Vol. 15 No. 6 Year of Publication 2012 Page 707-712
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area	[A30] Materials Science and Engineering
Research Method	[M40] X-ray/Soft X-ray Absorption Spectroscopy

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0008496	Yamazaki	Hideyuki	Toshiba Corporation
Coauthor 1	0004423	Yoshiki	Masahiko	Toshiba Corporation
Coauthor 2	0021691	Takaishi	Riichiro	Toshiba Corporation
Coauthor 3	0015222	Takeno	Shiro	Toshiba Corporation

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