Title/Place of Publication
2182
2007.01.30 10:55
10.1143/JJAP.41.4253
Precise Control of Si(001) Initial Oxidation by Translational Kinetic Energy of O2 Molecules
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Japanese Journal of Applied Physics
41 6B 2002 4253-4260
2001 International Microprocesses and Nanotechnology Conference (MNC2001)
2001.10.31-11.02 Matsue, Japan
Authors
 
First Author 0000390 Teraoka Yuden JAERI
Coauthor 1 0001305 Yoshigoe Akitaka JAERI
Related Proposal Information
None BL23SU SPring-8 Experiment