Title/Place of Publication
Publication ID
2182
Date Created
2007.01.30 10:55
DOI
10.1143/JJAP.41.4253
Open Access URL
English Title
Precise Control of Si(001) Initial Oxidation by Translational Kinetic Energy of O
2
Molecules
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Japanese Journal of Applied Physics
Vol.
41
No.
6B
Year of Publication
2002
Page
4253-4260
Place of Publication (Oral, Poster)
Conference Title
2001 International Microprocesses and Nanotechnology Conference (MNC2001)
Date
2001.10.31-11.02
Venue
Matsue, Japan
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0000390
Teraoka
Yuden
JAERI
Coauthor 1
0001305
Yoshigoe
Akitaka
JAERI
Related Proposal Information
Proposal Number
None
Beamline
BL23SU
Facility to be used
SPring-8
Classification within the Site
Experiment