タイトル・発表先
21526
2012.05.31 10:12
10.1002/sia.3876
Characterization of Ar Ion Etching Induced Damage for GaN
原著論文／博士論文／査読付プロシーディングス
Surface and Interface Analysis
44 6 2012 709-712
著者情報
 
主著者 0014336 Kataoka Keita Toyota Central Research and Development Laboratories, Inc.
共著者 1 0021962 Kimoto Yasuji Toyota Central Research and Development Laboratories, Inc.
共著者 2 Kayo Horibuchi Toyota Central Research and Development Laboratories, Inc.
共著者 3 0004399 Nonaka Takamasa Toyota Central Research and Development Laboratories, Inc.
共著者 4 0018550 Takahashi Naoko Toyota Central Research and Development Laboratories, Inc.
共著者 5 0024947 Narita Tetsuo Toyota Central Research and Development Laboratories, Inc.
共著者 6 Kanechika Masakazu Toyota Central Research and Development Laboratories, Inc.
共著者 7 0006932 Dohmae Kazuhiko Toyota Central Research and Development Laboratories, Inc.
関連課題情報
2010B7011 BL33XU 片岡 恵太