User Information

Title/Place of Publication
Publication ID	21526
Date Created	2012.05.31 10:12
DOI	10.1002/sia.3876
Open Access URL
English Title	Characterization of Ar Ion Etching Induced Damage for GaN
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Surface and Interface Analysis Vol. 44 No. 6 Year of Publication 2012 Page 709-712
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area
Research Method

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author	0014336	Kataoka	Keita	Toyota Central Research and Development Laboratories, Inc.
Coauthor 1	0021962	Kimoto	Yasuji	Toyota Central Research and Development Laboratories, Inc.
Coauthor 2		Kayo	Horibuchi	Toyota Central Research and Development Laboratories, Inc.
Coauthor 3	0004399	Nonaka	Takamasa	Toyota Central Research and Development Laboratories, Inc.
Coauthor 4	0018550	Takahashi	Naoko	Toyota Central Research and Development Laboratories, Inc.
Coauthor 5	0024947	Narita	Tetsuo	Toyota Central Research and Development Laboratories, Inc.
Coauthor 6		Kanechika	Masakazu	Toyota Central Research and Development Laboratories, Inc.
Coauthor 7	0006932	Dohmae	Kazuhiko	Toyota Central Research and Development Laboratories, Inc.

Related Proposal Information
Proposal Number 2010B7011 Beamline BL33XU Project Leader 片岡恵太