Title/Place of Publication
1830
2007.01.30 10:55
10.1143/JJAP.39.7026
Initial Oxidation of Si(001) Induced by the Translational Kinetic Energy of O2 Supersonic Molecular Beams
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Japanese Journal of Applied Physics
39 12B 2000 7026-7030
13th International Microprocesses and Nanotechnology Conference (MNC2000)
2000.07.11-07.13 Tokyo, Japan
Authors
 
First Author 0001305 Yoshigoe Akitaka JAERI
Coauthor 1 0001705 Sano Mutsumi JAERI
Coauthor 2 0000390 Teraoka Yuden JAERI
Related Proposal Information
None BL23SU SPring-8 Experiment