Title/Place of Publication
Publication ID
1820
Date Created
2007.01.30 10:55
DOI
10.1063/1.1398074
Open Access URL
English Title
Microscopic Observation of Cu Damascene Interconnect Grains Using X-Ray Microbeam
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Journal of Applied Physics
Vol.
90
No.
6
Year of Publication
2001
Page
2792-2795
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0004127
Hasegawa
Masaki
Hitachi, Ltd.
Coauthor 1
0004083
Hirai
Yasuharu
Hitachi, Ltd.
Related Proposal Information
Proposal Number
C00A0300
Beamline
BL16XU
Project Leader
平井 康晴