Title/Place of Publication
Publication ID
1809
Date Created
2007.01.30 10:55
DOI
10.1143/JJAP.40.7129
Open Access URL
English Title
Capacitance X-Ray Absorption Fine Structure Method Using Dopant Photoionization: X-Ray Absorption Spectroscopy of ∼nm Thickness Channel in Semiconductor Devices
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Japanese Journal of Applied Physics
Vol.
40
No.
12
Year of Publication
2001
Page
7129-7134
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0001178
Ishii
Masashi
JASRI
Related Proposal Information
Proposal Number
1999B0168
Beamline
BL10XU
Project Leader
石井 真史
Proposal Number
2000B0181
Beamline
BL10XU
Project Leader
石井 真史