Title/Place of Publication
Publication ID
17960
Date Created
2010.11.26 14:27
DOI
10.1149/1.3481610
Open Access URL
English Title
Synchrotron Radiation Photoelectron Spectroscopy of Metal Gate / HfSiO(N) / SiO(N) / Si Stack Structures
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
ECS Transactions
Vol.
33
No.
3
Year of Publication
2010
Page
231-240
Place of Publication (Oral, Poster)
Conference Title
218th ECS Meetings
Date
2010.10.10-10.15
Venue
Las Vegas, USA
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0004068
Oshima
Masaharu
The University of Tokyo
Coauthor 1
0017294
Toyoda
Satoshi
The University of Tokyo
Coauthor 2
0021674
Kamada
Hiroyuki
The University of Tokyo
Coauthor 3
0019539
Tanimura
Tatsuhiko
The University of Tokyo
Coauthor 4
0023376
Nakamura
Yuki
The University of Tokyo
Coauthor 5
0002632
Horiba
Koji
The University of Tokyo
Coauthor 6
0014918
Kumigashira
Hiroshi
The University of Tokyo
Related Proposal Information
Proposal Number
2009B7402
Beamline
BL07LSU
Project Leader
組頭 広志
Proposal Number
2010A7402
Beamline
BL07LSU
Project Leader
組頭 広志