Title/Place of Publication
Publication ID
16796
Date Created
2010.04.22 19:02
DOI
10.1143/JJAP.49.04DD11
Open Access URL
English Title
Study of Charge Trap Sites in SiN Films by Hard X-ray Photoelectron Spectroscopy
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Japanese Journal of Applied Physics
Vol.
49
No.
4
Year of Publication
2010
Page
04DD11
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
[A10] Life Science
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0015901
Kosemura
Daisuke
Meiji University
Coauthor 1
0020331
Takei
Munehisa
Meiji University
Coauthor 2
Nagata
Kohki
Meiji University
Coauthor 3
0023947
Akamatsu
Hiroaki
Meiji University
Coauthor 4
0022858
Hattori
Maki
Meiji University
Coauthor 5
Katayama
Daisuke
Tokyo Electron AT
Coauthor 6
0024071
Nishita
Tatsuo
Tokyo Electron AT
Coauthor 7
Hirota
Yoshihiro
Tokyo Electron AT
Coauthor 8
0005913
Machida
Masatake
SPring-8/JASRI
Coauthor 9
0000618
Son
JinYoung
SPring-8/JASRI
Coauthor 10
0005256
Koganezawa
Tomoyuki
SPring-8/JASRI
Coauthor 11
0002088
Hirosawa
Ichiro
SPring-8/JASRI
Coauthor 12
0015928
Ogura
Atsushi
Meiji University
Related Proposal Information
Proposal Number
2008B1917
Beamline
BL46XU
Project Leader
小椋 厚志
Proposal Number
2008B2073
Beamline
BL46XU
Project Leader
小椋 厚志