Title/Place of Publication
Publication ID
15190
Date Created
2009.12.02 10:43
DOI
10.1007/s00542-008-0584-5
Open Access URL
English Title
Fabrication of Large Area Diffraction Grating using LIGA Process
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Microsystem Technologies
Vol.
14
No.
9-11
Year of Publication
2008
Page
1311-1315
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
Noda
Daiji
University of Hyogo
Coauthor 1
0014834
Tanaka
Makoto
University of Hyogo
Coauthor 2
0016339
Shimada
Kazuma
University of Hyogo
Coauthor 3
0003297
Yashiro
Wataru
The University of Tokyo
Coauthor 4
0004353
Momose
Atsushi
The University of Tokyo
Coauthor 5
0005725
Hattori
Tadashi
University of Hyogo
Related Proposal Information
Proposal Number
2006A1236
Beamline
BL20XU
Project Leader
百生 敦