Title/Place of Publication
15189
2009.12.02 10:37
10.1007/s00542-006-0226-8
Fabrication of Diffraction Grating for X-ray Talbot Interferometer
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Microsystem Technologies
13 5-6 2007 543-546
Authors
 
First Author Matsumoto Masatake Nagase Chemtex Co., Ltd.
Coauthor 1 0008645 Takiguchi kinji Himeji Institute of Technology
Coauthor 2 0014834 Tanaka Makoto Himeji Institute of Technology
Coauthor 3 Hunabiki Yoichi Nano Create Co., Ltd.
Coauthor 4 Takeda Hiroaki IIKEX Industry Co., Ltd
Coauthor 5 0004353 Momose Atsushi The University of Tokyo
Coauthor 6 0003401 Utsumi Yuichi Himeji Institute of Technology
Coauthor 7 0005725 Hattori Tadashi Himeji Institute of Technology
Related Proposal Information
2004A0537 BL20XU 百生 敦