Title/Place of Publication
14934
2009.11.27 00:26
10.1016/j.physb.2009.08.155
Control of Impurity Diffusion in Silicon by IR Laser Excitation
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Physica B
404 23-24 2009 4685-4688
[A10] Life Science
[M10] X-ray Diffraction
Authors
 
First Author 0020410 Shirai Koun Osaka University
Coauthor 1 0022937 Matsukawa Kazuhito Renesas Technology Corporation
Coauthor 2 0001733 Moriwaki Taro SPring-8/JASRI
Coauthor 3 0002134 Ikemoto Yuka SPring-8/JASRI
Related Proposal Information
2007A1960 BL43IR 白井 光雲