Title/Place of Publication
Publication ID
14778
Date Created
2009.10.23 16:31
DOI
10.1143/JJAP.48.101401
Open Access URL
English Title
Densification of Chemical Vapor Deposition Silicon Dioxide Film Using Ozone Treatment
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Japanese Journal of Applied Physics
Vol.
48
No.
10
Year of Publication
2009
Page
101401
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
[A10] Life Science
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0005022
Kawase
Kazumasa
Mitsubishi Electric Corporation
Coauthor 1
Noda
Seiji
Mitsubishi Electric Corporation
Coauthor 2
Nakai
Takafumi
Mitsubishi Electric Corporation
Coauthor 3
0004121
Uehara
Yasushi
Mitsubishi Electric Corporation
Related Proposal Information
Proposal Number
2007B5130
Beamline
BL16XU
Project Leader
河瀬 和雅