Title/Place of Publication
Publication ID
14535
Date Created
2009.08.18 15:18
DOI
10.1149/1.3070626
Open Access URL
English Title
Evaluation and Control of Strain in Si Induced by Patterned SiN Stressor
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Electrochemical and Solid-State Letters
Vol.
12
No.
4
Year of Publication
2009
Page
H117-H119
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
[A10] Life Science
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0015928
Ogura
Atsushi
Meiji University
Coauthor 1
0019324
Saitoh
Hiroyuki
Meiji University
Coauthor 2
0015901
Kosemura
Daisuke
Meiji University
Coauthor 3
0018229
Kakemura
Yasuto
Meiji University
Coauthor 4
0019092
Yoshida
Tetsuya
Meiji University
Coauthor 5
0020331
Takei
Munehisa
Meiji University
Coauthor 6
0005256
Koganezawa
Tomoyuki
SPring-8/JASRI
Coauthor 7
0002088
Hirosawa
Ichiro
SPring-8/JASRI
Coauthor 8
Kohno
M.
Tokyo Electron AT
Coauthor 9
0024071
Nishita
Tatsuo
Tokyo Electron AT
Coauthor 10
Nakanishi
T.
Tokyo Electron AT
Related Proposal Information
Proposal Number
2007A1216
Beamline
BL46XU
Project Leader
小椋 厚志