Title/Place of Publication
Publication ID
145
Date Created
2007.01.30 10:55
DOI
Open Access URL
English Title
Analysis of Ordered Structure of Buried Oxide Layers in Simox Wafers
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Vol.
99-3
No.
Year of Publication
1999
Page
155-160
Place of Publication (Oral, Poster)
Conference Title
Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Date
1999.05.02-05.07
Venue
Seattle, USA
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0001281
Shimura
Takayoshi
Osaka University
Coauthor 1
0004419
Hosoi
Takuji
Osaka University
Coauthor 2
0005066
Umeno
Masataka
Osaka University
Related Proposal Information
Proposal Number
1999A0024
Beamline
BL09XU
Project Leader
志村 考功