Title/Place of Publication
Publication ID
13743
Date Created
2009.02.25 18:08
DOI
10.1016/j.vacuum.2008.04.068
Open Access URL
English Title
Effect of Heating on the Residual Stresses in TiN Films Investigated using Synchrotron Radiation
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Vacuum
Vol.
83
No.
3
Year of Publication
2008
Page
585-588
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0008092
Matsue
Tatsuya
Niihama National College of Technology
Coauthor 1
0008084
Hanabusa
Takao
Tokushima University
Coauthor 2
0008085
Kusaka
Kazuya
Tokushima University
Coauthor 3
0003369
Sakata
Osami
SPring-8/JASRI
Related Proposal Information
Proposal Number
2006A1537
Beamline
BL13XU
Project Leader
英 崇夫